Transmission electron microscopy of silicon VLSI circuits and structures / R.B. Marcus and T.T. Sheng.

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TextPublication details: New York : Wiley, c1983.Description: x, 217 p. : ill. ; 29 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Barcode
Books	Central Library, KUET General Stacks	621.38173 MAR (Browse shelf(Opens below))	1	Available	3010010110

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"A Wiley-Interscience publication."

Includes bibliographical references and index.

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