@book{14040,
	author = {Brand, Oliver,},
	title = {Resonant MEMS :},
	publisher = {Wiley-VCH Verlag & Co. KGaA,},
	year = {[2015]},
	series = {Advanced micro and nanosystems},
	address = {Wiesbaden :},
	url = {http://onlinelibrary.wiley.com/book/10.1002/9783527676330}
}