@book{16801,
	author = {Choudhary, Vikas.},
	title = {MEMS},
	publisher = {Taylor & Francis,},
	year = {2013.},
	series = {Devices, circuits, and systems},
	address = {Boca Raton :},
	url = {http://marc.crcnetbase.com/isbn/9781466515826}
}