<?xml version="1.0" encoding="UTF-8"?>
<record
    xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
    xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd"
    xmlns="http://www.loc.gov/MARC21/slim">

  <leader>02087nam a2200361Ia 4500</leader>
  <datafield tag="999" ind1=" " ind2=" ">
    <subfield code="c">16801</subfield>
    <subfield code="d">16801</subfield>
  </datafield>
  <controlfield tag="001">CRC0KE16714PDF</controlfield>
  <controlfield tag="003">BD-KhUET</controlfield>
  <controlfield tag="005">20181108143504.0</controlfield>
  <controlfield tag="008">181108s2013    fluad   sb    001 0 eng d</controlfield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="a">9781466515826 (ebook : PDF)</subfield>
  </datafield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="a">9781138072305</subfield>
  </datafield>
  <datafield tag="040" ind1=" " ind2=" ">
    <subfield code="a">FlBoTFG</subfield>
    <subfield code="c">FlBoTFG</subfield>
    <subfield code="d">BD-KhUET</subfield>
  </datafield>
  <datafield tag="082" ind1=" " ind2=" ">
    <subfield code="2">23</subfield>
    <subfield code="a">621.381</subfield>
  </datafield>
  <datafield tag="245" ind1="0" ind2="0">
    <subfield code="a">MEMS</subfield>
    <subfield code="h">[electronic resource] :</subfield>
    <subfield code="b">fundamental technology and applications /</subfield>
    <subfield code="c">editors, Vikas Choudhary, Krzysztof Iniewski.</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="a">Boca Raton :</subfield>
    <subfield code="b">Taylor &amp; Francis,</subfield>
    <subfield code="c">2013.</subfield>
  </datafield>
  <datafield tag="300" ind1=" " ind2=" ">
    <subfield code="a">xxii, 456 p. :</subfield>
    <subfield code="b">ill.</subfield>
  </datafield>
  <datafield tag="490" ind1="1" ind2=" ">
    <subfield code="a">Devices, circuits, and systems</subfield>
  </datafield>
  <datafield tag="504" ind1=" " ind2=" ">
    <subfield code="a">Includes bibliographical references and index.</subfield>
  </datafield>
  <datafield tag="505" ind1="0" ind2=" ">
    <subfield code="a">section 1. Breakthrough technology -- section 2. MEMS-based novel applications.</subfield>
  </datafield>
  <datafield tag="520" ind1=" " ind2=" ">
    <subfield code="a">"Written by international experts, this book presents the latest research in the field of MEMS technology and the myriad applications that it has enabled. The text covers automotive, consumer, communication, and medical applications of MEMs. Some of the applications discussed include high-precision on-chip integrated oscillators for reference generations, gyroscopes in cameras for optical image stabilization, radio communication, bio-implantable kidneys, and mobile phones. Other chapters address MEMS packaging and MEMS resonators, providing a fundamental understanding to enable novel applications. There is also a chapter outlining the historical evolution of current nano micro systems"--</subfield>
  </datafield>
  <datafield tag="530" ind1=" " ind2=" ">
    <subfield code="a">Also available in print edition.</subfield>
  </datafield>
  <datafield tag="538" ind1=" " ind2=" ">
    <subfield code="a">Mode of access: World Wide Web.</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Microelectromechanical systems.</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Microelectronic packaging.</subfield>
    <subfield code="9">144</subfield>
  </datafield>
  <datafield tag="655" ind1=" " ind2="7">
    <subfield code="a">Electronic books.</subfield>
    <subfield code="2">lcsh</subfield>
  </datafield>
  <datafield tag="700" ind1="1" ind2=" ">
    <subfield code="a">Choudhary, Vikas.</subfield>
  </datafield>
  <datafield tag="700" ind1="1" ind2=" ">
    <subfield code="a">Iniewski, Krzysztof.</subfield>
  </datafield>
  <datafield tag="776" ind1="1" ind2=" ">
    <subfield code="z">9781466515819 (hardback)</subfield>
  </datafield>
  <datafield tag="830" ind1=" " ind2="0">
    <subfield code="a">Devices, circuits, and systems.</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2="0">
    <subfield code="u">http://marc.crcnetbase.com/isbn/9781466515826</subfield>
    <subfield code="q">application/PDF</subfield>
    <subfield code="z">Distributed by publisher. Purchase or institutional license may be required for access.</subfield>
  </datafield>
  <datafield tag="942" ind1=" " ind2=" ">
    <subfield code="2">ddc</subfield>
    <subfield code="c">BK</subfield>
  </datafield>
  <datafield tag="952" ind1=" " ind2=" ">
    <subfield code="0">0</subfield>
    <subfield code="1">0</subfield>
    <subfield code="2">ddc</subfield>
    <subfield code="4">0</subfield>
    <subfield code="7">1</subfield>
    <subfield code="a">KUETCL</subfield>
    <subfield code="b">KUETCL</subfield>
    <subfield code="c">DISPLAY</subfield>
    <subfield code="d">2018-05-16</subfield>
    <subfield code="g">7196.00</subfield>
    <subfield code="l">0</subfield>
    <subfield code="o">621.381 MEM</subfield>
    <subfield code="p">3010053743</subfield>
    <subfield code="r">2018-11-08 00:00:00</subfield>
    <subfield code="t">01</subfield>
    <subfield code="w">2018-11-08</subfield>
    <subfield code="y">BK</subfield>
  </datafield>
</record>
