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  <titleInfo>
    <title>MEMS</title>
    <subTitle>fundamental technology and applications</subTitle>
  </titleInfo>
  <name type="personal">
    <namePart>Choudhary, Vikas.</namePart>
  </name>
  <name type="personal">
    <namePart>Iniewski, Krzysztof.</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <genre authority="lcsh">Electronic books.</genre>
  <originInfo>
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    <place>
      <placeTerm type="text">Boca Raton</placeTerm>
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    <publisher>Taylor &amp; Francis</publisher>
    <dateIssued>2013</dateIssued>
    <issuance>monographic</issuance>
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  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
    <form authority="marcform">electronic</form>
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    <extent>xxii, 456 p. : ill.</extent>
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  <abstract>"Written by international experts, this book presents the latest research in the field of MEMS technology and the myriad applications that it has enabled. The text covers automotive, consumer, communication, and medical applications of MEMs. Some of the applications discussed include high-precision on-chip integrated oscillators for reference generations, gyroscopes in cameras for optical image stabilization, radio communication, bio-implantable kidneys, and mobile phones. Other chapters address MEMS packaging and MEMS resonators, providing a fundamental understanding to enable novel applications. There is also a chapter outlining the historical evolution of current nano micro systems"--</abstract>
  <tableOfContents>section 1. Breakthrough technology -- section 2. MEMS-based novel applications.</tableOfContents>
  <note type="statement of responsibility">editors, Vikas Choudhary, Krzysztof Iniewski.</note>
  <note>Includes bibliographical references and index.</note>
  <note>Also available in print edition.</note>
  <note>Mode of access: World Wide Web.</note>
  <subject authority="lcsh">
    <topic>Microelectromechanical systems</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Microelectronic packaging</topic>
  </subject>
  <classification authority="ddc" edition="23">621.381</classification>
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    <titleInfo>
      <title>Devices, circuits, and systems</title>
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  <identifier type="isbn">9781466515826 (ebook : PDF)</identifier>
  <identifier type="isbn">9781138072305</identifier>
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