@book{4826,
	author = {Campbell, Stephen A.,},
	title = {The science and engineering of microelectronic fabrication /},
	publisher = {Oxford University Press,},
	year = {c2001 [reprinted 2004].},
	series = {The Oxford series in electrical and computer engineering},
	address = {New York :},
	edition = {2nd ed.},
	url = {http://www.loc.gov/catdir/enhancements/fy0610/00051022-d.html}
}