01785nam a2200301 a 4500 120502r20042001nyua b 001 0 eng d 00051022 0195136055 DLC DLC DLC BD-KhUET 621.38152 21 Campbell, Stephen A., 1954- The science and engineering of microelectronic fabrication / Stephen A. Campbell. 2nd ed. New York : Oxford University Press, c2001 [reprinted 2004]. xiv, 603 p. : ill. ; 24 cm. The Oxford series in electrical and computer engineering Includes bibliographical references and index. Semiconductors Design and construction. Publisher description http://www.loc.gov/catdir/enhancements/fy0610/00051022-d.html Table of contents only http://www.loc.gov/catdir/enhancements/fy0610/00051022-t.html 4826 4826 0 0 ddc 0 0 KUETCL KUETCL GEN 2006-02-13 SBC 484.25 0 621.38152 CAM 3010034308 2012-05-03 00:00:00 1 2012-05-03 BK 0 0 ddc 0 0 KUETCL KUETCL GEN 2006-02-13 M/S Shaurov Book Centre 484.25 0 621.38152 CAM 3010034309 2012-07-02 00:00:00 2 2012-07-02 BK 0 0 ddc 0 0 KUETCL KUETCL GEN 2006-02-13 M/S Shaurov Book Center 484.25 0 621.38152 CAM 3010034307 2012-07-31 00:00:00 3 2012-07-31 BK 0 0 ddc 0 0 KUETCL KUETCL GEN 2006-02-13 M/S Shaurov Book Centre 484.25 0 621.38152 CAM 3010034310 2012-09-10 00:00:00 4 2012-09-10 BK 0 0 ddc 0 0 KUETCL KUETCL GEN 2006-02-13 484.25 0 621.38152 CAM 3010034306 2012-10-07 00:00:00 5 2012-10-07 BK