TY  - BOOK
AU  - Muller,Richard S.
ED  - IEEE Electron Devices Society.
TI  - Microsensors
SN  - 0879422459
AV  - TK7870 .M4575 1991
U1  - 681.2 20
PY  - 1991///
CY  - New York
PB  - IEEE Press
KW  - Miniature electronic equipment
KW  - Design and construction
KW  - Detectors
KW  - Microelectronics
N1  - "Prepared under the sponsorship of the IEEE Electron Devices Society."; Includes bibliographical references (p. 451-461) and indexes
ER  -