| 000 | 00955nam a2200241 a 4500 | ||
|---|---|---|---|
| 008 | 111219s1983 nyua b 001 0 eng d | ||
| 010 | _a83003469 | ||
| 020 | _a0471092517 | ||
| 040 |
_aDLC _cDLC _dDLC _dBD-KhUET |
||
| 082 | 0 | 0 |
_a621.38173 _219 |
| 100 | 1 |
_aMarcus, R. B. _q(Robert B.) |
|
| 245 | 1 | 0 |
_aTransmission electron microscopy of silicon VLSI circuits and structures / _cR.B. Marcus and T.T. Sheng. |
| 260 |
_aNew York : _bWiley, _cc1983. |
||
| 300 |
_ax, 217 p. : _bill. ; _c29 cm. |
||
| 500 | _a"A Wiley-Interscience publication." | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aIntegrated circuits. | |
| 650 | 0 | _aTransmission electron microscopy. | |
| 700 | 1 |
_aSheng, T. T. _q(Tai Tsu) |
|
| 999 |
_c2301 _d2301 |
||