| 000 | 01785nam a2200301 a 4500 | ||
|---|---|---|---|
| 008 | 120502r20042001nyua b 001 0 eng d | ||
| 010 | _a00051022 | ||
| 020 | _a0195136055 | ||
| 040 |
_aDLC _cDLC _dDLC _dBD-KhUET |
||
| 082 | 0 | 0 |
_a621.38152 _221 |
| 100 | 1 |
_aCampbell, Stephen A., _d1954- |
|
| 245 | 1 | 4 |
_aThe science and engineering of microelectronic fabrication / _cStephen A. Campbell. |
| 250 | _a2nd ed. | ||
| 260 |
_aNew York : _bOxford University Press, _cc2001 [reprinted 2004]. |
||
| 300 |
_axiv, 603 p. : _bill. ; _c24 cm. |
||
| 490 | 0 | _aThe Oxford series in electrical and computer engineering | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0610/00051022-d.html |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0610/00051022-t.html |
| 999 |
_c4826 _d4826 |
||